Wafer-Scale Growth of a MoS2 Monolayer via One Cycle of Atomic Layer Deposition: An Adsorbate Control Method

Dae Hyun Kim, Jae Chan Park, Jeongwoo Park, Deok-Yong Cho, Woo-Hee Kim, Bonggeun Shong,* Ji-Hoon Ahn,* and Tae Joo Park*